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Buyer's Guide Home > Trion Technology Minilock-Orion III - Plasma Enhanced Chemical Vapor Deposition (PECVD) System with a Vacuum Loadlock |
Minilock-Orion III - Plasma Enhanced Chemical Vapor Deposition (PECVD) System with a Vacuum Loadlock |
Description: A vacuum loadlocked PECVD system
http://www.triontech.com/minilock_orion.htm
Minilock-Orion III - Plasma Enhanced Chemical Vapor Deposition (PECVD) System with a Vacuum Loadlock appears in the following categories:
[Version 1.6.3.6]
